Performance-optimized gate-first 22-nm SOI technology with embedded DRAM

IBM's high-performance 22-nm silicon-on-insulator (SOI) technology is the enabling physical foundation of IBM POWER8™ processors. This paper describes, for the first time in detail, some of the unique aspects of the silicon processing, the features that enabled the industry-leading chip-level performance, and some aspects of the collaborative approach between technology and design teams that enabled both first-time-right silicon and rapid yield improvement. Most critical to the processor functional capability and power-performance achievements are the high-density on-chip memory in the form of embedded DRAM and the high-performance FET device designs based on a low-parasitic-capacitance gate-first FET architecture. Extensive on-chip analog functions are enabled by an additional comprehensive set of devices available in the technology. Fifteen levels of metal with five metal levels at an 80-nm pitch provide the interconnect and power distribution. We describe the pattern resolution enhancement strategy as well as motivation and structural aspects of the innovative features, from the low-resistance N+ epitaxy substrate under the SOI to a dual-embedded source-drain architecture and a highly scaled gate dielectric.