Development of ECR multicharged ion sources for accelerators

Several types of ECR ion sources for production of intense multicharged ion beams of gaseous and solid materials in the mass range He - Bi with the intensity more than 1mA (for Ar8+) are described. The axial magnetic field is created by the water cooled copper coils, or superconducting coils. The radial magnetic field is created by the permanent magnet (NdFeB) system. For the plasma heating a microwave generators with the frequency of 14 GHz or 18GHz are used.