Micro and nanocoordinate measurements of microparts with 3D tunnelling current probing

Measurement tasks of today's micro and nanometrology are posing a problem for current measurement instruments with falling structure sizes and rising aspect ratios. There's an open requirement for nanometre resolving 3D capable sensors and corresponding 3D positioning systems to operate the sensors for 3D measurements. A 3D probing system based on electrical interaction is presented which is operated on a nanopositioning system NMM-1. Furthermore we demonstrate the progress and new possibilities for 3D measurements with the nanopositioning and nanomeasurement machine NMM-1 and also with the application of a rotary kinematic chain. In addition new 3D measurement routines of the NMM-1, also for microtactile probing systems as well as current plans, are shown.