Resonance Frequency Shift of Magnetostrictive Microcantilevers due to DeltaE Effect

Magnetostrictive resonance sensors offer the opportunity to remotely monitor chemical and biological concentrations as well as several physical quantities. The aimed quantity of these types of sensors, i.e., the resonance frequency, can be considerably shifted exploiting the DeltaE Effect. In this contribution, we present a magnetostrictive microcantilever with a size of 1500 micrometer x 72micrometer x 5micrometer. We report on the fabrication of the cantilever applying a thin film process and present a measurement setup and methods to determine the bending resonance frequency of the cantilever. Frequency shifts of up to 13% are easily achievable by applying a DC magnetic biasing field strength of 35kA/m. We demonstrate that the amplitude of the excitation field does not influence the bending resonance frequency. This makes the magnetostrictive microcantilever applicable for a wireless pressure sensor.