Charging mechanisms in nanostructured dielectrics for MEMS capacitive switches

The paper investigates the dielectric charging in nanostructured materials already used or potential candidate for insulating films in MEMS capacitive switches. The investigation takes into account the percolation transport through grain boundaries in polycrystalline materials as well as trough nanoparticles, such as carbon nanotubes that are introduced to control the conductivity. The impact on conductivity and dielectric constant are also discussed.