A highly integrated T/R module for active phased array antennas

A highly integrated transmit/receive (T/R) module that has achieved integration levels superior to any MMIC module is described. The highly integrated T/R module is achieved by using LTCC (Low Temperature Co-fired Ceramic) multiple layer substrate, highly integrated MMIC chip-set, large-signal simulation for switching MESFET circuits, high power and high efficiency amplifiers using a PHEMT process, multiple-cavity package, advanced thin-film substrate which enables to realize air bridge structures, and self align like void free MMIC die-bonding technique.