Low-loss substrate-removed (SURE) optical waveguides in GaAs-AlGaAs epitaxial layers embedded in organic polymers

Low-loss single-mode semiconductor rib optical waveguides fabricated in GaAs-AlGaAs epitaxial layers are removed from GaAs substrates and bonded to transfer substrates using a benzocyclobutene organic polymer. Optical quality facets were obtained by cleaving through the transfer substrate. An average propagation loss of 0.39 and 0.48 dB/cm at 1.55 μm wavelength for TE and TM polarizations, respectively, were measured. This was on average 0.05 dB/cm greater than control guides fabricated in GaAs-AlGaAs epilayers on GaAs substrates with air as the top cladding. This demonstrates the feasibility of a process enabling semiconductor polymer integration and processing both sides of an epitaxial layer.