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Mapping Defect Density in MBE Grown - Epitaxial Layers on Si Substrate Using Esaki Diode Valley Characteristics | IEEE Journals & Magazine | IEEE Xplore

Mapping Defect Density in MBE Grown {\rm In}_{0.53}{\rm Ga}_{0.47}{\rm As} Epitaxial Layers on Si Substrate Using Esaki Diode Valley Characteristics


Abstract:

Growing good quality III–V epitaxial layers on Si substrate is of utmost importance to produce next generation high-performance devices in a cost effective way. In this p...Show More

Abstract:

Growing good quality III–V epitaxial layers on Si substrate is of utmost importance to produce next generation high-performance devices in a cost effective way. In this paper, using physical analysis and electrical measurements of Esaki diodes, fabricated using molecular beam epitaxy grown {\rm In}_{0.53}{\rm Ga}_{0.47}{\rm As} layers on Si substrate, we show that the valley current density is strongly correlated with the underlying epi defect density. Such a strong correlation indicates that the valley characteristics can be used to monitor the epi quality. A model is proposed to explain the experimental observations and is validated using multiple temperature diode I{-}V data. An excess defect density is introduced within the device using electrical and mechanical stress, both of which are found to have a direct impact on the valley current with a negligible change in the peak current characteristics, qualitatively supporting the model predictions.
Published in: IEEE Transactions on Electron Devices ( Volume: 61, Issue: 6, June 2014)
Page(s): 2049 - 2055
Date of Publication: 08 May 2014

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