Fabrication process for thick-film micromachined multi-pole electromagnets

This letter introduces a fabrication process for thick (>50 μm) multipole electromagnets that produce fields exceeding 20 mT across 0.2-mm
³
free-space volumes. The novelty of the process involves the multistep thick-film electroplating of a magnetic alloy inside a high-density high-aspect-ratio solenoidal coil, producing high intensity fields across a larger volume than previous microelectromechanical systems electromagnets. To demonstrate an application enabled by this process, a 600-μm-gap four-pole electromagnet is fabricated, packaged, and used to steer a 34-keV electron beam.