ORMOCERs/sup TM/-new photo-patternable dielectric and optical materials for MCM-packaging

Hybrid inorganic-organic polymers (ORMOCERs) have been developed and tested in an ongoing EU-program (BE 7250 DONDOMCM) for evaluation in MCM applications. The photopatternable materials with negative resist behavior are composed of inorganic oxidic structures cross-linked or substituted by organic groups. They are prepared from organosilane precursors by sol-gel-processing in combination with organic crosslinking of polymerizable organic functions. As a result of these functionalities the properties of the ORMOCERs can be adjusted to particular applications. Systematic variation of composition combined with adaptation to micro system technology allows great flexibility in processing. Some features of these materials are: postbaking at moderate temperatures (120/spl deg/C-180/spl deg/C) enables processing on substrates such as FR-4 and BT. Combined use as dielectric and passivation layers in electrical systems and devices as well as core and cladding for optical applications enables e/o applications with high integration levels. Easily adaptable to thin film technology: spin-on with planarization >90% and via diameters down to 20 /spl mu/m have been achieved.