SU-8 2000 Millimeter Wave Material Characterization

SU-8 2000 is an epoxy based photoresist widely used in the fabrication of MEMS for its thick film capability. SU-8 also holds promise as a low cost material for millimeter wave packaging and devices where thick films are required. This letter investigates the electrical material properties of SU-8 2000 at frequencies beyond 140 GHz. Characterization using microstrip ring and T resonators reveal a dielectric constant of 3.0 across the entire band with an approximate loss tangent of 0.04.