Stress sensitivity of SAW rayleigh waves on lithiumniobate and its application in pressure sensor design

A combination of experimental investigation and FEM simulation was used to obtain the sensitivity of two Rayleigh cuts on lithiumniobate LN YZ with Euler angles of (0°, 90°, 90°) and LN 128 (0°, 38°, 0°) to stress and strain. The obtained stress sensitivity was used in designing, fabricating and testing a delay line based membrane pressure sensor with temperature compensation proposed for medical application.