Benchmarking Transition Metal Dichalcogenide MOSFET in the Ultimate Physical Scaling Limit

In this letter, we propose a nonplanar transition metal dichalcogenide (TMD) channel field effect transistor and explore its ballistic performance in the ultimate scaling limit of sub-5 nm physical gate length (L
_g
) using self-consistent nonequilibrium Greens function framework. It is observed that electrostatic integrity remains intact even at such ultrashort L
_g
and physical scaling is eventually limited by direct source-drain tunneling. Benchmarking different TMD channels at various off-state current conditions shows potential for ultralow-leakage applications with small footprint, excellent energy efficiency, and moderate performance.