Static and dynamic responses of GaN piezoresistive microcantilever with embedded AlGaN/GaN HFET for sensing applications

In this article, a highly sensitive AlGaN/GaN Heterostructure Field Effect Transistor (HFET) embedded GaN piezoresistive microcantilever is presented. In addition, deflection transduction signal from the HFET is showed for the first time to determine dynamic response of the cantilever, and also acoustic wave resonance which detected periodic vibration amplitudes of 4.6 nm when the sensor was placed 1 cm away from an ultrasonic source. Moreover sensing of acetone has been demonstrated using photo acoustic wave principal using the GaN microcantilever embedded with AlGaN/GaN HFET.