Micropump for Generation and Control of Vacuum Inside Miniature Devices

The microengineered MEMS-type ion-sorption micropump with field-emission electron source has been shown. Effective emission properties of the carbon nanotubes cathode ensure satisfactory efficiency of residual gas ionization, showing possibility of active pumping of circa 0.05 cm
³
volume down to 10
^-5
hPa. Measurement of ion current allows estimation of vacuum level inside the microcavity.