A Bi-Phase MEMS Resonator Modulator

The high-electric field piezoelectric properties of a PZT-transduced, two-port, acoustic resonator are utilized to create a binary phase shift modulator. The modulator operates at frequencies below 100 MHz in a length extensional mode. Typical peak modulation voltage levels are 7 V. The design is configured as a subsystem with separate RF and data ports for use in low data rate, battery-powered networks.