Laser beam carrier injection technique for CMOS LSI failure analysis using an OBIC: light-induced state transition (LIST) method

This paper describes a new technique, called the Light-Induced State Transition (LIST) method that uses an optical beam induced current (OBIC) system for failure analysis of CMOS LSIs. This technique allows one to locate a low signal line short-circuited to a GND bus (or a high signal line short-circuited to a V/sub DD/ bus) in stand-by condition which is not possible with conventional failure analysis techniques such as photo-emission analysis, liquid crystal technique, or the conventional OBIC method. The effectiveness of the LIST method was verified by an experiment on inverter chains that included quasi-failures intentionally patched by FIB deposition. The LIST method has also been used for actual CMOS logic failure analysis, and has proved to be useful for finding a failure location rapidly.