Monolithic 2GHz electrostatically actuated MEMS oscillator with opto-mechanical frequency multiplier

We present a silicon opto-acoustic oscillator operating at 2.05GHz with signal power +18dBm and phase noise -80dBc/Hz at 10kHz offset from carrier. We employ displacement amplification and partial air gap capacitive transduction to enhance the transduction efficiency. Built-in nonlinear opto-mechanical modulation provides noiseless upconversion of the oscillation signal all the way up to 16.4GHz with -45dBm signal power. We isolate oscillation harmonics at 4.1GHz and 6.15GHz and measure phase noise of -74dBc/Hz and -70dBc/Hz respectively at 10kHz offset from carrier. The monolithic opto-mechanical frequency multiplier eliminates the need for external active multipliers.