Gas detection and identification using MEMS TOF mass spectrometer

This work reports on both the micro fabrication of a miniaturized MEMS ion source and its utilization as a simple Time-Of-Flight (TOF) MEMS mass spectrometer for gas detection. Microelectronic manufacturing process is used for the fabrication. The ion source and the analyzer are manufactured simultaneously and collectively. The ionizer generates one of the highest current for an integrated ion source. Mass spectra of several gases, such as ethanol, argon, krypton and xenon have been obtained.