Past, current and future TFT technologies for display manufacturing

TFT active-matrix is a key technology for display manufacturing such as AMLCD and AMOLED display. Past, current and future TFT technologies are reviewed and discussed with the use of amorphous silicon (a-Si), low-temperature poly-Si (LTPS), organic and oxide semiconductors. TFT technologies based on a-Si:H and LTPS are mature enough, but the TFTs with oxide and organic semiconductors are still many issues to be solved for large scale manufacturing. Currently, display manufacturing based on a-IGZO TFT backplane is hot issue because a-Si:H production line can be easily modified to that for IGZO TFTs.