Theory and numerical analysis of bulk acoustic wave multilayer composite resonator structure

Rigorous analytical expressions describing multilayer BAW microwave composite resonator-filter with input and output electrodes and taking into account wave properties and acoustic losses of all layers of the structure are obtained. The results are represented in the form of simple Z-coefficients connecting input and output voltages and currents. A special case of the multilayer /spl lambda//4 substrate providing one mode operation is analyzed and discussed. All the results are illustrated with numerical calculations.