A self-filling low-cost membrane micropump

We present a new membrane micropump fabricated by micro mold injection and laser based techniques. Due to an innovative pump design featuring an extremely small internal volume and a large compression ratio the pumps are the first micropumps to combine outstanding technical performance with a really easy handling. The pumps work equally well with gases and liquids and exhibit a very reliable self-filling behavior with liquids. Pumping water we have achieved maximum pump rates of 400 /spl mu/l/min and a maximum back pressure of 2100 hPa. Using air the pumps can build up pressures of up to 500 hPa and generate a maximum flow rate of 3.5 ml/min. The maximum vacuum the pumps can create amounts to 350 hPa. Due to the use of replication based fabrication techniques and optimized assembly methods, the pump design has the potential for production costs on the order of 5 DM. The new micropump is being manufactured in a small series production and is available for industrial evaluation.