Development of a new type piezoelectric micromotor

We designed and fabricated a piezoelectric micromotor which has a new structure suited for miniaturization. The prototype piezoelectric micromotor we fabricated has 2 mm in diameter and 2 mm in height. It consists of a disk-shaped rotor, a cantilever stator and several oscillators with elements made by PZT ceramics. These elements are integrated into the prototype piezoelectric micromotor in a flat configuration. The rotor rotates at 50 to 450 rpm and a drive voltage ranging from 2 to 10 V/sub pp/.