Transmission of Infrared Radiation Through Metallic Photonic Crystal Structures

Monolithic integration of a metallic photonic crystal (mPhC) structure onto semiconductor infrared (IR) photodetectors can enhance the detector performances. In order to experimentally investigate the parameters involved in optimizing the transmission spectra of the mPhC structures matching the detector operating wavelength in mid- and long-wave IR (MWIR and LWIR) regimes, square thin gold (Au) hole arrays having periodicities of 4.0, 3.6, 2.4, and 1.8 μm with various fill factors were fabricated on Si or GaAs substrates in a wafer scale. The thicknesses of the Au films are 50, 100, and 200 nm, respectively. Through this systemic study, suitable mPhC structures were revealed that can be readily integrated onto our type-II InGaSb-based quantum dot MWIR and LWIR photodetectors.