Time of flight image sensor with 7um pixel and 640×480 resolution

Time of flight (ToF) sensor with pixel size of 7×7um and VGA resolution is developed using a backside illumination (BSI) structure. Quantum efficiency (QE) of near infrared (NIR) light is improved dramatically by applying thick epitaxial layer, reflection metal and anti-reflection layer. The depth error ranges are 2cm and 10cm at 90% and 10% reflection condition at the distance of 7m, respectively.