Optimized gradient-free PZT thin films for micro-actuators

For its outstanding piezoelectric coefficients, thin-film sol-gel Pb(Zr
_0.52,
Ti
_0.48
)O
₃
(PZT) has been widely studied over the past few decades. In particular, the impact of Zr/Ti ratio control on e
_31,eff
coefficient has been investigated at low fields. Yet, when it comes to actuation, PZT films are used with electric fields higher than the coercive field. In this paper, the influence of Zr/Ti gradient reduction on e
_31,eff
coefficient is investigated in actuating conditions, ie under high fields.