MEMS 3-axis inertial sensor process

This paper introduces a modified MEMS foundry process allowing the production of 3D inertial sensors. The new MEMS process is suitable for a wide range of applications that use 3D accelerometers or gyroscopes. One-axis and three-axis designs can be produced with the same process, and the fabrication of complex inertial measurement units, particularly the assembly process, is simplified.