Novel Method for Fabrication of Tri-Gated Poly-Si Nanowire Field-Effect Transistors With Sublithographic Channel Dimensions

A high-performance short-channel tri-gated polycrystalline-silicon nanowire (NW) field-effect transistor is developed by using simple sidewall spacer and lateral etching techniques without employing costly lithographic tools. Channel length of 120 nm and NW thickness of 25 nm can be easily formed by the self-aligned process. The device exhibits superior electrical characteristics because of the strong gate controllability: a subthreshold swing of 102 mV/dec, drain induced barrier lowing of 74.4 mV/V, and extremely high I
_ON
/I
_OFF
ratio of 4.4 ×10
⁸
(V
_d
=1 V) are obtained.