Coplanar waveguide stub/filters on thin membranes and standard substrates

Several coplanar waveguide series stubs and filter structures based on such stubs were designed and manufactured on standard semiinsulating GaAs substrates and thin GaAs membranes as well as on silicon based thin dielectric membranes. Coplanar waveguide circuits realized on thin membranes offer significant advantages over conventional coplanar or microstrip lines for monolithic or hybrid MIC applications.