VLSI platform for the monolithic integration of single-crystal Si NEMS capacitive resonators with low-cost CMOS

This work constitutes the first demonstration of monolithic integration of single-crystal silicon capacitive NEMS resonators with CMOS. With this approach, the efficiency of the electrical detection of the NEMS motion is outstanding and achieved with only seven transistors that are fabricated with a completely unmodified and very low-cost 0.35μm bulk CMOS technology.