Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table

The rotational motion effect on the sensitivity matrix of a MEMS three-axis accelerometer was evaluated to realize the concurrent calibration of multiple MEMS accelerometers using a multi-axis shaker. The stage position dependency on the sensitivity matrix of a single-mass capacitive SOI three-axis accelerometer was measured. We found that the rotational motions generated by the resonance of the shaker causes an acceleration error on the accelerometer and can be compensated by measuring it using gyroscopes.