Silicon microring resonator sensors for the detection of volatile organic compounds

We demonstrate a volatile organic compounds (VOC) gas detection using silicon based microring resonator devices. Polymer is chemically attached to sidewall of silicon waveguide and microring as a cladding layer. Absorption of VOC gases into the polymer film induces a resonance wavelength shift. A detection limit of 10 part per million (ppm) for both toluene and acetone has been achieved.