Ion current distribution within a toroidal duct of a filtered vacuum arc deposition system

Vacuum arcs were established on a 90-mm-diameter Ti cathode in a deposition apparatus consisting of a spacer, 122 mm-diameter annular anode, quarter-torus magnetic macroparticle filter, and a deposition chamber. A toroidal magnetic field generally parallel to the torus walls of up to 20 mT was applied. The ion current in various cross-sections of the toroidal duct was measured using: 1) a disc probe of 130-mm diameter, oriented normal to the torus axis used to measure the transmitted ion current, and 2) a hollow cylindrical probe of 135-mm diameter and 25-mm height, whose axis coincided with the torus axis, used to measure ion current losses to the duct wall. The distribution of ion current loss was studied using an 8-segment hollow cylindrical multiprobe, where the individual probes were equally distributed on the circumference of a 130-mm-diameter circle. It was shown that: 1) the ratio of ion currents collected on the cylindrical and disc probes at first decreases with increasing the toroidal field, and then becomes approximately constant; 2) the presence of the large-diameter disc probe does not influence the value of the ion current on the cylindrical probe; and 3) the maximum ion current density near the torus walls is located in the +g direction and displaces in the -(B/spl times/g) direction with increasing the toroidal field, where g and B are the vectors of the centrifugal acceleration and the magnetic field, respectively.