Large-Area MgB2 Films Fabricated by Scaled-Up Hybrid Physical - Chemical Vapor Deposition

A scaled-up hybrid physical-chemical vapor deposition (HPCVD) method has been developed to fabricate large-area high-quality magnesium diboride (MgB
₂
) thin films. The 2-in-diameter MgB
₂
thin films on sapphire (0001) show uniform superconducting properties, including
Tc
~ 39 K, residual-resistivity ratio ~ 14, and
Jc
(4.2 K) ~ 10
⁷
A/cm
²
. X-ray diffraction showed that the films are epitaxial with
c
-axis normal to the film surface. The film properties are uniform across the 2-in substrate.