Using FEA to treat piezoelectric low-frequency resonators

For micromachined components, it is difficult and costly to rely only on experiments due to their small size. Nevertheless, a detailed understanding of their functioning, also on a system level, is essential if their numerous device possibilities are to be used to their fullest extent. Development efforts can be focused on the device if performance predictions can be made with available computer software. This paper addresses the use of available finite element analysis (FEA) programs. Comparing simulation and analytic results show that FEA can be used to accurately predict properties such as static and harmonic response, frequency-dependent impedances, and piezo-induced changes in resonance frequencies. A limitation is the need for CPU-power, especially when determining high overtones. Also, piezoelectric materials with a finite resistivity are more complicated to handle.