IC microsensors-between system and technology

In the last 25 years the area of transducers has been enriched by integrated microtransducers, i.e. miniaturized sensors and actuators, designed and fabricated using methods reminiscent of silicon integrated circuit (IC) technology. IC microsensors and actuators promise to be superior in many aspects compared to discrete systems and to penetrate application domains up to now closed for transducers. This paper reviews the state-of-the-art in IC microsensor development. First, technological aspects such as micromachining and packaging are addressed. Second, system level considerations are discussed by a methodical approach for microsensor compensation and calibration. Finally, two examples, a CMOS ac power converter and a CMOS flow sensor demonstrate the significance of the IC sensor approach.