Micromachined Terahertz Rectangular Waveguide Bandpass Filter on Silicon-Substrate

A micromachined 385 GHz rectangular waveguide cavity bandpass filter is presented. The proposed filter is fabricated using deep reactive ion etching on silicon substrate, with sputtered gold inner surface metallization. The vector network analyzer measured results show the lowest insertion loss is about 2.7 dB with a 15 GHz bandwidth. Effects of micro-electro-mechanical systems process on the filter's performance are discussed in detail.