Design of a millimeter-wave MEMS antenna array

In this paper, a phased array of aperture coupled microstrip antenna with a 0-π phase shifter is demonstrated. The phase shifting necessary to steer the main beam of the antenna of the aperture is achieved by 0-π phase shifter, which are integrated in a hybrid fashion between the antenna and feed network. The design of RF-MEMS phase shifters is presented and validated by very good measurement results.