Force and Torque Errors Due to Manufacturing Tolerances in Planar Actuators

This paper discusses the force and torque errors in moving-magnet planar actuators due to manufacturing tolerances. Two different planar actuator topologies are under consideration, and errors due to variations in the magnetization vector, the magnet positions, and the coil positions are evaluated by Monte-Carlo simulations. The effect of these force and torque errors on the positioning accuracy of the planar actuators are estimated from the process sensitivity transfer of a suitable controller.