Modeling and simulation of silicon-based planar transmission lines for micromachined filter applications

This paper presents CAD modeling and simulation of three kinds of micromachined planar transmission lines on 400 µm thick silicon substrate. Microtrip, microshield line and shielded membrane microstrip (SMM) are modeled and analyzed with Ansoft HFSS 13.0. Their physical structures and the corresponding simulated results are discussed and compared, respectively. Novel silicon-based filter design consideration is also introduced, and is a starting point for updating previous works on traditional hybrid integrated dielectric substrates.