MEMS micromirror based X-ray pulse modulators

We describe a MEMS micromirror for modulation of X-ray pulses needed for critical time-resolved process studies of cyclical and far-from-equilibrium phenomena. This MEMS micromirror leverages grazing-angle reflection of X-ray pulses to generate its temporal modulation response. The generated responses are 1.5μs wide for 8keV X-rays and have been successfully used to isolate single X-ray pulses separated 1.59μs from their suppressed neighboring pulses.