The oxygen effect on CdS/CdTe solar cell activated with CHClF2

The solar cells were fabricated using layers ITO/ZnO/CdS/CdTe. Films of ZnO and CdS were deposited by rf-sputtering. The CdTe film was grown by the conventional technique of closed space sublimation (CSS). The cells were activated by using the following gases: argon, CHClF
2
-argon and CHClF
2
-argon-oxygen. The last gas improves the J
SC
and V
OC
. Cu (15 nm) and Mo (500 nm) used as back contact were deposited by rf-sputtering.