The electron optics properties of micro-column with field emitter

We successfully demonstrated the electron optics properties of newly designed micro-column in this report. The micro-column consisted of an electron gun and objective lens. The electron gun was structured with FEA and condenser lens. The each structure was optimized in order to perform each abilities and not to disturb other's function. It was confirmed that the diameter of focused beam was around 40μm at 2mm of working distance under 400 times magnification and free electrical field.