CCD-based magnetic field imaging

A linear array similar to a photodiode line-scan CCD, but with MOS magnetic sensors replacing the photodiodes, has been fabricated. Magnetic signals are collected as charges and read out as in a conventional CCD. The magnetic sensor pixels have been optimized and exhibit sensitivities of up to 109.7%/Tesla [1.097%(10 mT)], which is 14.7 times the 7%/Tesla sensitivity normally found in CMOS magnetic sensors. The 1/f noise likewise decreases by more than an order of magnitude. The improved performance over CMOS is possible because of superior magnetic sensing properties resulting from buried-channel conduction, and because the CCD readout allows the sensors to be optimized independently of the readout circuitry.