On-chip THz 3D antennas

In this work a new class of integrated 3D antennas is presented: the u-helix antenna class. U-helix is a truncated conical helix built using a novel MEMS (micro electro mechanical systems) technology directly realized on a silicon substrate, extruded from a planar spiral. The antenna is characterized by high gain (>;6 dBi) and wide fractional bandwidth (0.4) in the 100 GHz to 1 THz frequency range. Fabrication processes of the antenna and simulated performances are reported, and its possible use in a THz rectifying device is presented.