Design, analysis and testing of a linear/theta motor for semiconductor applications

In this paper, the design optimization of an integral linear and rotary motor, used in the application of aluminium wedge wire bonds onto integrated circuits, are described. The use of a three phase rotary motor combined with a linear voice coil motor, as well as the bearing technologies that make such a design possible, are explored. The lumped parameter magnetic circuit modeling, constrained optimization and magnetostatic finite element analysis (FEA) performed to produce the optimum design is discussed. Detailed experimental verification are also presented to validate the theoretical predictions.