A 2-DOF Electrostatically Actuated MEMS Nanopositioner for On-Chip AFM

A new 2-DOF microelectromechanical systems (MEMS)-based parallel kinematic nanopositioner with electrostatic actuation is presented. The device has been designed, fabricated, and implemented using the silicon-on-insulator-based MEMSCAP SOIMUMPs process. Experimental characterization shows that in-plane displacements in excess of 15 μm are achievable and that the first resonant mode along each axis is located at approximately 820 Hz. The nanopositioner's use in a practical application is demonstrated, with the device being used as the scanning stage during an atomic force microscope scan.