Fast parameter extraction for multiconductor interconnects in multilayered dielectric media using mixture method of equivalent source and measured equation of invariance

Measured equation of invariance (MEI) has been successfully used in many applications. It has been illustrated that the MEI is specially suitable for the decrease of computation time and computer memory space. However, for multiconductor interconnects in multilayered dielectric media, the Green's function is complex and the integrals of Sommerfeld type are time consuming. In this paper, equivalent source and measured equation of invariance (ES-MEI), a modification of the MEI, has been presented. Based on the equivalent principle, a reasonable illustration of the MEI can be obtained by ES-MEI. The node number is further decreased and the integrals of metron multiplied Green's function are avoided. It will be verified by several examples that the ES-MEI is very suitable for fast parameter extraction for multiconductor interconnects in multilayered dielectric media.