A systematic study of a-CN/sub x/ overcoat film for proximity recording

This paper takes a systematic approach to study the correlation between the film growth processes and mechanical properties of amorphous carbon nitride overcoat films for proximity recording. The film properties were characterized by resistivity measurements, Raman spectroscopy, Auger and XPS depth profiling, and high resolution XPS scans of C/sub 1s/ and N/sub 1s/ core level bond energies. Results from these characterization methods can be correlated to the sputtering process parameters and the tribological scratch performance of the films.