Quality factor optimization process of a tapered slow-wave coplanar strips resonator in CMOS technology

This paper presents a design procedure for a high quality factor slow-wave tapered coplanar strips (CPS) resonator for application at 60 GHz in a 90 nm standard CMOS process. Utilizing the current and voltage standing wave profile in a quarter wavelength resonator, a slow-wave tapered resonator with an improved quality factor of 28.4 is designed. Due to the slow-wave structure, the resonator is compact and presents a quality factor improvement of 89% compared to the conventional tapered CPS resonator and 220% compared to the conventional uniform CPS resonator.